https://scholars.lib.ntu.edu.tw/handle/123456789/447836
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chen, L.-C. | en_US |
dc.contributor.author | Le, M.-T. | en_US |
dc.contributor.author | Lin, Y.-S. | en_US |
dc.contributor.author | LIANG-CHIA CHEN | en_US |
dc.creator | LIANG-CHIA CHEN;Lin, Y.-S.;Le, M.-T.;Chen, L.-C. | - |
dc.date.accessioned | 2020-01-13T08:21:32Z | - |
dc.date.available | 2020-01-13T08:21:32Z | - |
dc.date.issued | 2014 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/447836 | - |
dc.relation.ispartof | Measurement Science and Technology | - |
dc.title | 3-D micro surface profilometry employing novel Mirau-based lateral scanning interferometry | en_US |
dc.type | journal article | en |
dc.identifier.doi | 10.1088/0957-0233/25/9/094004 | - |
dc.identifier.scopus | 2-s2.0-84906277003 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906277003&doi=10.1088%2f0957-0233%2f25%2f9%2f094004&partnerID=40&md5=d1012e30d5b5cc3b931229ad5ec5401c | - |
dc.relation.journalvolume | 25 | - |
dc.relation.journalissue | 9 | - |
item.fulltext | no fulltext | - |
item.openairetype | journal article | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
crisitem.author.dept | Mechanical Engineering | - |
crisitem.author.dept | Center for Artificial Intelligence and Advanced Robotics | - |
crisitem.author.orcid | exist | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
Appears in Collections: | 機械工程學系 |
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