https://scholars.lib.ntu.edu.tw/handle/123456789/447846
Title: | Portable measurement system for static and dynamic characterization of MEMS component | Authors: | Wu, H.-W. Chen, L.-C. Tapilouw, A.M. Nguyen, X.-L. Chen, J.-L. LIANG-CHIA CHEN |
Issue Date: | 2013 | Journal Volume: | 234 LNEE | Start page/Pages: | 931-939 | Source: | Lecture Notes in Electrical Engineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447846 | DOI: | 10.1007/978-1-4614-6747-2_108 |
Appears in Collections: | 機械工程學系 |
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