https://scholars.lib.ntu.edu.tw/handle/123456789/447891
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chen, L.-C. | en_US |
dc.contributor.author | Fan, K.-C. | en_US |
dc.contributor.author | Lin, C.-D. | en_US |
dc.contributor.author | Chang, C.C. | en_US |
dc.contributor.author | Kao, C.-F. | en_US |
dc.contributor.author | Chou, J.-T. | en_US |
dc.contributor.author | LIANG-CHIA CHEN | en_US |
dc.creator | LIANG-CHIA CHEN;Chou, J.-T.;Kao, C.-F.;Chang, C.C.;Lin, C.-D.;Fan, K.-C.;Chen, L.-C. | - |
dc.date.accessioned | 2020-01-13T08:21:43Z | - |
dc.date.available | 2020-01-13T08:21:43Z | - |
dc.date.issued | 2005 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/447891 | - |
dc.relation.ispartof | Proceedings of SPIE - The International Society for Optical Engineering | - |
dc.title | 3-D surface profilometry for both static and dynamic nano-scale full field characterization of AFM micro cantilever beams | en_US |
dc.type | conference paper | en |
dc.identifier.doi | 10.1117/12.614683 | - |
dc.identifier.scopus | 2-s2.0-29244433563 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-29244433563&doi=10.1117%2f12.614683&partnerID=40&md5=36b76d707d8c912277e05caebfce3c2e | - |
dc.relation.pages | 1-12 | - |
dc.relation.journalvolume | 5878 | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
item.grantfulltext | none | - |
item.openairetype | conference paper | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
crisitem.author.dept | Mechanical Engineering | - |
crisitem.author.dept | Center for Artificial Intelligence and Advanced Robotics | - |
crisitem.author.orcid | exist | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
Appears in Collections: | 機械工程學系 |
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