https://scholars.lib.ntu.edu.tw/handle/123456789/447943| Title: | Improvement on Ferroelectricity and Endurance of Ultra-Thin HfZrO<inf>2</inf> Capacitor with Molybdenum Capping Electrode | Authors: | Chen, K.-T. Liao, C.-Y. Lo, C. Chen, H.-Y. Siang, G.-Y. Liu, S. Chang, S.-C. Liao, M.-H. Chang, S.-T. Lee, M.H. MING-HAN LIAO |
Issue Date: | 2019 | Start page/Pages: | 62-64 | Source: | 2019 Electron Devices Technology and Manufacturing Conference | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447943 | DOI: | 10.1109/EDTM.2019.8731272 |
| Appears in Collections: | 機械工程學系 |
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