https://scholars.lib.ntu.edu.tw/handle/123456789/447953
Title: | Shallow trench isolation geometric influence of a recessed surface on array-type arrangements of nano-scaled devices strained by contact etch stop liner and Ge-based stressors | Authors: | Hsieh, C.-P. Liao, M.-H. Lee, C.-C. Cheng, T.-C. Wang, C.-P. Huang, P.-C. Cheng, S.-W. MING-HAN LIAO |
Issue Date: | 2016 | Journal Volume: | 618 | Start page/Pages: | 172-177 | Source: | Thin Solid Films | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447953 | DOI: | 10.1016/j.tsf.2016.03.015 |
Appears in Collections: | 機械工程學系 |
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