https://scholars.lib.ntu.edu.tw/handle/123456789/447957
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Liao, M.-H. | en_US |
dc.contributor.author | MING-HAN LIAO | en_US |
dc.creator | MING-HAN LIAO;Chen, C.-H.;Liao, M.-H. | - |
dc.date.accessioned | 2020-01-13T08:22:36Z | - |
dc.date.available | 2020-01-13T08:22:36Z | - |
dc.date.issued | 2015 | - |
dc.identifier.issn | 21583226 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/447957 | - |
dc.relation.ispartof | AIP Advances | - |
dc.title | Erratum: The novel chamber hardware design to improve the thin film deposition quality in both 12″ (300 mm) and 18″ (450 mm) wafers with the development of 3D full chamber modeling and experimental visual technique; (AIP Advances (2013) 3:7 (072117)) | en_US |
dc.type | erratum | en |
dc.identifier.doi | 10.1063/1.4918681 | - |
dc.identifier.scopus | 2-s2.0-84928143367 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84928143367&doi=10.1063%2f1.4918681&partnerID=40&md5=8db0da50ee0b9471c601e3234f192558 | - |
dc.relation.journalvolume | 5 | - |
dc.relation.journalissue | 4 | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_18cf | - |
item.openairetype | erratum | - |
item.grantfulltext | none | - |
crisitem.author.orcid | 0000-0003-2942-4520 | - |
Appears in Collections: | 機械工程學系 |
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