https://scholars.lib.ntu.edu.tw/handle/123456789/447979| Title: | Carrier backscattering characteristics of nanoscale strained complementary metal-oxide-semiconductor devices featuring the optimal stress engineering | Authors: | Chang, S.-T. Liao, M.-H. Lee, C.-C. Huang, J. Wang, W.-C. MING-HAN LIAO MING-HAN LIAO |
Issue Date: | 2009 | Journal Volume: | 27 | Journal Issue: | 3 | Start page/Pages: | 1261-1266 | Source: | Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447979 | DOI: | 10.1116/1.3125275 |
| Appears in Collections: | 機械工程學系 |
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