https://scholars.lib.ntu.edu.tw/handle/123456789/448000
Title: | The novel chamber hardware design to improve the thin film deposition quality in both 12 <sup>?</sup> (300 mm) and 18 <sup>?</sup> (450 mm) wafers with the development of 3D full chamber modeling and experimental visual technique | Authors: | Liao, M.-H. Chen, C.-H. MING-HAN LIAO |
Issue Date: | 2013 | Journal Volume: | 3 | Journal Issue: | 7 | Start page/Pages: | 072117 | Source: | AIP Advances | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/448000 | ISSN: | 2158-3226 | DOI: | 10.1063/1.4816437 |
Appears in Collections: | 機械工程學系 |
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