https://scholars.lib.ntu.edu.tw/handle/123456789/448070
Title: | Cost-effective and channel-scalable hardware decoders for multiple electron-beam direct-write systems | Authors: | Yu, Chun-Chang Lin, Pei-Chun Lu, Yi-Chang PEI-CHUN LIN CHUNG-PING CHEN |
Issue Date: | 2018 | Journal Volume: | 17 | Journal Issue: | 03 | Start page/Pages: | 1 | Source: | Journal of Micro/Nanolithography, MEMS, and MOEMS | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/448070 | ISSN: | 1932-5150 | DOI: | 10.1117/1.JMM.17.3.031202 |
Appears in Collections: | 機械工程學系 |
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