https://scholars.lib.ntu.edu.tw/handle/123456789/448556
Title: | Macromodeling of coupled-domain MEMS devices with electrostatic and electrothermal effects | Authors: | Yang, Y.-J. Cheng, S.-Y. Shen, K.-Y. YAO-JOE YANG |
Issue Date: | 2004 | Journal Volume: | 14 | Journal Issue: | 8 | Start page/Pages: | 1190-1196 | Source: | Journal of Micromechanics and Microengineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/448556 | DOI: | 10.1088/0960-1317/14/8/011 |
Appears in Collections: | 機械工程學系 |
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