https://scholars.lib.ntu.edu.tw/handle/123456789/451452
Title: | Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises | Authors: | Lee, Y.-M. Li, J.-H. Wang, F.-M. Cheng, H.-H. Shen, Y.-T. Tsai, K.-Y. Shieh, J.J. KUEN-YU TSAI JIA-HAN LI |
Issue Date: | 2014 | Journal Volume: | 16 | Journal Issue: | 6 | Source: | Journal of Optics (United Kingdom) | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/451452 | DOI: | 10.1088/2040-8978/16/6/065706 |
Appears in Collections: | 工程科學及海洋工程學系 |
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