https://scholars.lib.ntu.edu.tw/handle/123456789/451468| Title: | Electron-beam proximity effect model calibration for fabricating scatterometry calibration samples | Authors: | Shen, Y.-T. Liu, C.-H. Chen, C.-Y. Ng, H.-T. Tsai, K.-Y. Wang, F.-M. Kuan, C.-H. Lee, Y.-M. Cheng, H.-H. Li, J.-H. Chen, A.C. JIA-HAN LI |
Issue Date: | 2012 | Journal Volume: | 8324 | Source: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/451468 | DOI: | 10.1117/12.918109 |
| Appears in Collections: | 工程科學及海洋工程學系 |
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