https://scholars.lib.ntu.edu.tw/handle/123456789/486167
Title: | Generating high DOF light by using tapered hollow tube in a lithography system | Authors: | Chen, C.-Y. Lee, Y.-H. Chien, C.-J. Yu, Y.-Y. CHIH-KUNG LEE |
Issue Date: | 2012 | Journal Volume: | 8249 | Source: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/486167 | DOI: | 10.1117/12.906722 |
Appears in Collections: | 應用力學研究所 |
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