https://scholars.lib.ntu.edu.tw/handle/123456789/486413
Title: | Enhancement of micromechanical resonator manufacturing precision via mechanically-coupled arraying | Authors: | Lin, Y. Li, W.-C. Kim, B. Lin, Y.-W. Ren, Z. Nguyen, C.T.-C. WEI-CHANG LI |
Issue Date: | 2009 | Start page/Pages: | 58-63 | Source: | 2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/486413 | DOI: | 10.1109/FREQ.2009.5168142 |
Appears in Collections: | 應用力學研究所 |
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