https://scholars.lib.ntu.edu.tw/handle/123456789/487075| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, C.-Y. | en_US |
| dc.contributor.author | Wu, T.-T. | en_US |
| dc.contributor.author | Chen, Y.-Y. | en_US |
| dc.contributor.author | Cheng, Y.-C. | en_US |
| dc.contributor.author | Chen, W.-J. | en_US |
| dc.contributor.author | Pao, S.-Y. | en_US |
| dc.contributor.author | Chang, P.-Z. | en_US |
| dc.contributor.author | Chen, P.-H. | en_US |
| dc.contributor.author | Yen, K.-H. | en_US |
| dc.contributor.author | PING-HEI CHEN | en_US |
| dc.contributor.author | PEI-ZEN CHANG | en_US |
| dc.contributor.author | TSUNG-TSONG WU | en_US |
| dc.creator | TSUNG-TSONG WU;Xiao, F.-Y.;Yen, K.-H.;Chen, P.-H.;Chang, P.-Z.;Pao, S.-Y.;Chen, W.-J.;Cheng, Y.-C.;Chen, Y.-Y.;Wu, T.-T.;Lee, C.-Y. | - |
| dc.date.accessioned | 2020-04-28T07:16:02Z | - |
| dc.date.available | 2020-04-28T07:16:02Z | - |
| dc.date.issued | 2004 | - |
| dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/487075 | - |
| dc.relation.ispartof | Proceedings of SPIE - The International Society for Optical Engineering | - |
| dc.title | Real time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor | en_US |
| dc.type | conference paper | - |
| dc.identifier.doi | 10.1117/12.544959 | - |
| dc.identifier.scopus | 2-s2.0-8844235075 | - |
| dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-8844235075&doi=10.1117%2f12.544959&partnerID=40&md5=82a1edb028ea97944f5b76aeb3a83820 | - |
| dc.relation.pages | 319-330 | - |
| dc.relation.journalvolume | 5455 | - |
| item.grantfulltext | none | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
| item.openairetype | conference paper | - |
| item.fulltext | no fulltext | - |
| item.cerifentitytype | Publications | - |
| crisitem.author.dept | Mechanical Engineering | - |
| crisitem.author.dept | Applied Mechanics | - |
| crisitem.author.orcid | 0000-0002-8073-9344 | - |
| crisitem.author.orcid | 0000-0002-4054-6791 | - |
| crisitem.author.parentorg | College of Engineering | - |
| crisitem.author.parentorg | College of Engineering | - |
| Appears in Collections: | 應用力學研究所 | |
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