https://scholars.lib.ntu.edu.tw/handle/123456789/488989
標題: | A dual probes AFM system with effective tilting angles to achieve high-precision scanning. | 作者: | Lin, Yi-Ting Lo, Yu-Ting Wu, Jim-Wei Liu, Wei-Chih LI-CHEN FU |
關鍵字: | Atomic force microscopy (AFM); Dual-probe AFM; High-precision scanning; Merging method; Tilting angle | 公開日期: | 2014 | 卷: | 2015-February | 期: | February | 起(迄)頁: | 6801-6806 | 來源出版物: | Proceedings of the IEEE Conference on Decision and Control | 會議論文: | 2014 53rd IEEE Annual Conference on Decision and Control, CDC 2014 | 摘要: | With the constant improvement of micro-fabrication techniques, the measurement of feature size of micro-fabricated structures becomes an important issue. Atomic force microscopy (AFM) is a high accuracy measurement instrument which has been widely used in micro-fabricated structures measurement recently. However, due to the monotonic tilting angle of the probe in traditional AFM system, the scanning results of sample with high steep wall feature usually have distortion phenomenon at the corner part of the sample. To solve this problem, a novel dual probe AFM system is proposed in this paper. A system structure with high flexibility is used in this work to create different tilting angle of each probe. With the tilting angle deciding method developed in this paper, we can estimate the effective tilting angles for scanning under different scenarios. In addition, a useful merging method is also designed in this work, which can stich result from different scanning unit together and produce high-precision scanning results. Experimental results are shown to validate the outstanding capability of the proposed system and methods. © 2014 IEEE. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/488989 https://www.scopus.com/inward/record.uri?eid=2-s2.0-84988259162&doi=10.1109%2fCDC.2014.7040457&partnerID=40&md5=24e683c820b8cd4715e3fa2699626478 |
ISSN: | 07431546 | DOI: | 10.1109/CDC.2014.7040457 | SDG/關鍵字: | Atomic force microscopy; Merging; Probes; Constant improvement; Fabricated structures; High flexibility; High-accuracy measurements; High-precision; Micro-fabrication techniques; System structures; Tilting angle; Scanning |
顯示於: | 資訊工程學系 |
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