https://scholars.lib.ntu.edu.tw/handle/123456789/491734
Title: | ZnO thin films prepared by atomic layer deposition at various temperatures from 100 to 180 °c with three-pulsed precursors in every growth cycle | Authors: | Cheng, Y.-C. Yuan, K.-Y. Chen, M.-J. MIIN-JANG CHEN |
Issue Date: | 2016 | Journal Volume: | 685 | Start page/Pages: | 391-394 | Source: | Journal of Alloys and Compounds | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/491734 | DOI: | 10.1016/j.jallcom.2016.05.289 |
Appears in Collections: | 材料科學與工程學系 |
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