https://scholars.lib.ntu.edu.tw/handle/123456789/497912
Title: | Recent research and challenges in multiple patterning layout decomposition | Authors: | Jiang, I.H.-R. Chang, H.-Y. HUI-RU JIANG |
Issue Date: | 2018 | Journal Volume: | 2018-July | Start page/Pages: | 498-499 | Source: | Proceedings of IEEE Computer Society Annual Symposium on VLSI, ISVLSI | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/497912 | DOI: | 10.1109/ISVLSI.2018.00096 |
Appears in Collections: | 電機工程學系 |
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