https://scholars.lib.ntu.edu.tw/handle/123456789/498719
標題: | Silicon nanowires synthesized by vapor-liquid-solid growth on excimer laser annealed thin gold film | 作者: | Meng, C.-Y. Shih, B.-L. SI-CHEN LEE |
關鍵字: | Excimer laser annealing; Gold film; Nanoparticle; Silicon nanowire | 公開日期: | 2007 | 卷: | 9 | 期: | 4 | 起(迄)頁: | 657-660 | 來源出版物: | Journal of Nanoparticle Research | 摘要: | The fabrication of Si nanowires has been demonstrated using excimer laser annealed thin gold film as the catalyst and vapor-liquid-solid (VLS) growth. Au nanoparticles with mean diameters of 12, 13 and 15 nm were formed by excimer laser annealing (ELA) of Au film with thickness of 2.5, 5 and 10 nm, respectively. The results show that the silicon nanowires (SiNWs) with desired diameter can be obtained by controlling the Au film thickness and laser power density. © 2006 Springer. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/498719 https://www.scopus.com/inward/record.uri?eid=2-s2.0-34248994318&doi=10.1007%2fs11051-005-4631-1&partnerID=40&md5=a4c9c233842f9cb081c4c0d7c4fd2089 |
ISSN: | 13880764 | DOI: | 10.1007/s11051-005-4631-1 | SDG/關鍵字: | Annealing; Excimer lasers; Film growth; Nanowires; Silicon; Synthesis (chemical); Thin films; Excimer laser annealing (ELA); Silicon nanowires; Thin gold films; Gold; gold; nanowire; silicon; article; catalyst; excimer laser; film; liquid; particle size; priority journal; solid state; synthesis; thickness; vapor |
顯示於: | 電機工程學系 |
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