https://scholars.lib.ntu.edu.tw/handle/123456789/498755
Title: | Structural differences between deuterated and hydrogenated silicon nitride/oxynitride | Authors: | Shih, A. Yeh, S.-H. Lee, S.-C. Yang, T.R. SI-CHEN LEE |
Issue Date: | 2001 | Journal Volume: | 89 | Journal Issue: | 10 | Start page/Pages: | 5355-5361 | Source: | Journal of Applied Physics | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/498755 | DOI: | 10.1063/1.1364645 |
Appears in Collections: | 電機工程學系 |
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