https://scholars.lib.ntu.edu.tw/handle/123456789/498795
Title: | The structural and optical properties of a-SiN <inf>x</inf> :H prepared by plasma-enhanced chemical-vapor deposition | Authors: | Lin, K.-C. Lee, S.-C. SI-CHEN LEE |
Issue Date: | 1992 | Journal Volume: | 72 | Journal Issue: | 11 | Start page/Pages: | 5474-5482 | Source: | Journal of Applied Physics | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/498795 | DOI: | 10.1063/1.351992 |
Appears in Collections: | 電機工程學系 |
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