https://scholars.lib.ntu.edu.tw/handle/123456789/581385
標題: | Novel Micro Scanning with Integrated Atomic Force Microscope and Confocal Laser Scanning Microscope | 作者: | Chou M.-H Huang C.-C Liu Y.-L Chen H.-C LI-CHEN FU |
關鍵字: | Atomic force microscopy; Edge detection; Laser applications; Microscopes; Adaptive scanning; Confocal laser scanning microscope; Cooperative algorithm; Nanoscale resolutions; Region of interesting; Regions of interest; Threedimensional (3-d); Variable speed; Scanning | 公開日期: | 2019 | 起(迄)頁: | 870-875 | 來源出版物: | CCTA 2019 - 3rd IEEE Conference on Control Technology and Applications | 摘要: | Integrated atomic force microscope (AFM) and confocal laser scanning microscope (CLSM) can quickly obtain the three-dimensional (3-D) surface of the sample in large scanning range and recover the region of interesting (ROI) in nanoscale resolution. However, the traditional cooperative algorithm for integrated microscopes occupies too much scanning time. In this work, we develop a novel cooperative algorithm for the integrated microscopes to reduce scanning time of AFM and achieve higher scanning speed. First, the calibration of the microscopes will be implemented. Next, CLSM starts a large range scan first and then define the region of interesting (ROI) by edge detection. And then, the scan regions of the AFM are arranged based on the ROI and adaptive scanning region method is proposed to reduce the scanning time. Furthermore, variable speed scanning based on the height information obtained from CLSM image is applied to increase the AFM scanning speed. Finally, the scanning images obtained from AFM and CLSM are merged together. A series of experimental results show that proposed cooperative algorithm can save approximately 69.2% of scanning time compared with that obtained by traditional cooperative algorithm. ? 2019 IEEE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85077801395&doi=10.1109%2fCCTA.2019.8920500&partnerID=40&md5=38c256480872b36a02e900e734be724e https://scholars.lib.ntu.edu.tw/handle/123456789/581385 |
DOI: | 10.1109/CCTA.2019.8920500 |
顯示於: | 資訊工程學系 |
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