Local stress determination in shallow trench insulator structures with one side and two sides pad SiN layer by polarized micro-Raman spectroscopy extraction and mechanical modelization

Please use this identifier to cite or link to this item: https://scholars.lib.ntu.edu.tw/handle/123456789/590707

Title:	Local stress determination in shallow trench insulator structures with one side and two sides pad SiN layer by polarized micro-Raman spectroscopy extraction and mechanical modelization
Authors:	M. H. Liao MING-HAN LIAO
Issue Date:	2009
Start page/Pages:	093511-093513
Source:	J. Appl. Phys
URI:	https://scholars.lib.ntu.edu.tw/handle/123456789/590707
Appears in Collections:	機械工程學系

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