https://scholars.lib.ntu.edu.tw/handle/123456789/590707| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | M. H. Liao | en_US |
| dc.contributor.author | MING-HAN LIAO | zz |
| dc.date.accessioned | 2021-12-30T03:01:58Z | - |
| dc.date.available | 2021-12-30T03:01:58Z | - |
| dc.date.issued | 2009 | - |
| dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/590707 | - |
| dc.relation.ispartof | J. Appl. Phys | - |
| dc.title | Local stress determination in shallow trench insulator structures with one side and two sides pad SiN layer by polarized micro-Raman spectroscopy extraction and mechanical modelization | en_US |
| dc.type | journal article | - |
| dc.relation.pages | 093511-093513 | - |
| item.fulltext | no fulltext | - |
| item.cerifentitytype | Publications | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
| item.grantfulltext | none | - |
| item.openairetype | journal article | - |
| crisitem.author.orcid | 0000-0003-2942-4520 | - |
| Appears in Collections: | 機械工程學系 | |
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