https://scholars.lib.ntu.edu.tw/handle/123456789/598369
標題: | Nano-Laminated Metal Oxides/Polyamide Stretchable Moisture- And Gas-Barrier Films by Integrated Atomic/Molecular Layer Deposition | 作者: | Tseng M.-H Su D.-Y Chen G.-L Tsai F.-Y. FENG-YU TSAI |
關鍵字: | atomic layer deposition;molecular layer deposition;nanolaminates;stretchable gas barriers;thin-film encapsulation;Atomic layer deposition;Hafnium oxides;Hydrogen peroxide;Metals;Moisture;Oxide films;Polymer films;Strain;Structural dynamics;Wearable technology;Electronics technology;Functionalizations;Mechanical stretching;Molecular layer depositions (MLD);Structural control;Surface chemisorption;Surface Functionalization;Water vapor transmission rate;Gas permeable membranes | 公開日期: | 2021 | 卷: | 13 | 期: | 23 | 起(迄)頁: | 27392-27399 | 來源出版物: | ACS Applied Materials and Interfaces | 摘要: | Stretchable barrier films capable of maintaining high levels of moisture- and gas-barrier performance under significant mechanical strains are a critical component for wearable/flexible electronics and other devices, but realization of stretchable moisture-barrier films has not been possible due to the inevitable issues of strain-induced rupturing compounded with moisture-induced swelling of a stretched barrier film. This study demonstrates nanolaminated polymer/metal oxide stretchable moisture-barrier films fabricated by a novel molecular layer deposition (MLD) process of polyamide-2,3 (PA-2,3) integrated with atomic layer deposition (ALD) metal oxide processes and an in situ surface-functionalization technique. The PA-2,3 surface upon in situ functionalization with H2O2 vapor offers adequate surface chemisorption sites for rapid nucleation of ALD oxides, minimizing defects at the PA-2,3/oxide interfaces in the nanolaminates. The integrated ALD/MLD process enables facile deposition and precise structural control of many-layered oxide/PA-2,3 nanolaminates, where the large number of PA-2,3 nanolayers provide high tolerance against mechanical stretching and flexing thanks to their defect-decoupling and stress-buffering functions, while the large number of oxide nanolayers shield against swelling by moisture. Specifically, a nanolaminate with 72 pairs of alternating 2 nm (5 cycles) PA-2,3 and 0.5 nm HfO2 (five cycles) maintains its water vapor transmission rate (WVTR) at the 10-6 g/m2 day level upon 10% tensile stretching and 2 mm-radius bending, a significant breakthrough for the wearable/flexible electronics technologies. ? 2021 American Chemical Society. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85108386293&doi=10.1021%2facsami.1c03895&partnerID=40&md5=41213bf17eb01d8ae29fc7344f3a8f37 https://scholars.lib.ntu.edu.tw/handle/123456789/598369 |
ISSN: | 19448244 | DOI: | 10.1021/acsami.1c03895 |
顯示於: | 材料科學與工程學系 |
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