https://scholars.lib.ntu.edu.tw/handle/123456789/598946
標題: | High-speed chromatic confocal microscopy using multispectral sensors for sub-micrometer-precision microscopic surface profilometry | 作者: | Chen L.-C Tan P.-J Wu G.-W Lin C.-J Nguyen D.T. LIANG-CHIA CHEN |
關鍵字: | Automated optical inspection (AOI);Chromatic confocal microscopy;Digital micromirror device;Multispectral sensor;Optical metrology | 公開日期: | 2021 | 卷: | 18 | 來源出版物: | Measurement: Sensors | 摘要: | A full-field chromatic confocal microscopy (CCM) using a multispectral sensor was developed for quasi-one-shot microscopic 3D surface measurement. An innovative optical configuration employs a digital micromirror device (DMD) and a multispectral sensor is used to realize CCM with full-field area scanning. In the optical design, an area-scan type chromatic dispersive objective is specially designed to achieve measuring specification. Based on a self-developed chromatic dispersive objective, the FOV for one shot measurement can be reached to 1.8×1.3 mm2 which is immersive to microscopic profilometry. The spectral image captured by the multispectral sensor at each pinhole position has a unique spectrum pattern corresponding to its conjugate measured depth. A normalized cross-correlation (NCC) algorithm is developed to establish a spectrum-depth response curve with its corresponding spectrum pattern sets for accurate reconstruction of the tested 3D surface profile. With real test on standard targets, the measurement repeatability for a single surface depth is less than 0.6 μm. ? 2021 |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85122681581&doi=10.1016%2fj.measen.2021.100165&partnerID=40&md5=ecb8a04884edd81cf339562052200043 https://scholars.lib.ntu.edu.tw/handle/123456789/598946 |
ISSN: | 26659174 | DOI: | 10.1016/j.measen.2021.100165 |
顯示於: | 機械工程學系 |
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