https://scholars.lib.ntu.edu.tw/handle/123456789/600240
標題: | Design ULVLED stepper with programmable reflective display panel as mask for multiple process wafer | 作者: | Huang J.-W CHIH-KUNG LEE |
關鍵字: | Binary lens;Programmable reflective LCoS;Programmable UVLED array;Sensors in wafer;ULVLED stepper;Display devices;Collimated lens;Multiple process;Multiple processing;Reflective display;Ultraviolet light-emitting diodes;Lenses | 公開日期: | 2021 | 卷: | 11613 | 來源出版物: | Proceedings of SPIE - The International Society for Optical Engineering | 摘要: | In making sensors require multiple processing by using different masks to accomplish, it needs reload and multiple aligning for a wafer in order to make a functional wafer, thus, the consuming for making mask are wasted, and used lamps toxic. In the study, a ULVLED stepper with Programmable LCoS or DLP as mask for multiple process wafer is proposed. By a programmable ultraviolet light-emitting diode (UVLED) array with a collimated lens as a transfer lens forms uniform source, to expose programmable LCoS or DLP as mask by using a 1 to 1 lithographic lens. Sensors and optical binary lens are easily made. ? 2021 SPIE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85105515114&doi=10.1117%2f12.2583817&partnerID=40&md5=b8d4b56b1a4f023336cc31586a19ca1c https://scholars.lib.ntu.edu.tw/handle/123456789/600240 |
ISSN: | 0277786X | DOI: | 10.1117/12.2583817 |
顯示於: | 應用力學研究所 |
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