https://scholars.lib.ntu.edu.tw/handle/123456789/606963
標題: | Highly Stacked GeSi Nanosheets and Nanowires by Lowerature Epitaxy and Wet Etching | 作者: | CHEE-WEE LIU Liu Y.-C Tu C.-T Tsai C.-E Huang B.-W Cheng C.-Y Chueh S.-J Chen J.-Y CHEE-WEE LIU |
關鍵字: | Chemical vapor deposition (CVD);GeSi;highly stacked channels;low temperature;nanosheets;nanowires;phosphorus;wet etching;Epilayers;Germanium;Nanosheets;Nanowires;Silicon;Temperature;Wet etching;Channel layers;Channel uniformity;Etching selectivity;Isotropic wet etching;Low growth temperature;Low temperature epitaxies;Sacrificial layer;Subthreshold slope;Si-Ge alloys | 公開日期: | 2021 | 卷: | 68 | 期: | 12 | 起(迄)頁: | 6599-6604 | 來源出版物: | IEEE Transactions on Electron Devices | 摘要: | The eight stacked Ge0.75Si0.25 nanosheets, the seven stacked Ge0.95Si0.05 nanowires, and the six stacked Ge0.95Si0.05 nanowires without parasitic channels are demonstrated. These highly stacked channels are made from 18 epilayers consisting of a Ge buffer, nine heavily P-doped Ge sacrificial layers, and eight GeSi channel layers with the low growth temperature (350 °C and 375 °C) to ensure the entire epilayers metastable without dislocations in the channels. The isotropic wet etching by H2O2 and NH4OH + H2O2 is used for the channel release and the removal of the parasitic channels, respectively. The delicate interplay between epilayer design and wet etching is implemented to fabricate the highly stacked GeSi channels. High inter-channel uniformity of the eight stacked Ge0.75Si0.25 nanosheets is obtained due to the superior etching selectivity. High I ON per stack and per footprint of the seven stacked Ge0.95Si0.05 nanowires and the six stacked Ge0.95Si0.05 nanowires without parasitic channels are achieved due to the high mobility L 4 valleys and nanowire conduction. The reduced subthreshold slope (SS) and improved I ON I OFF are obtained by parasitic channel removal. The record I ON of 120? μ A per stack (4600? μ A μ m per channel footprint) at V OV = V DS = 0.5 V is reached among reported Ge/GeSi 3-D nFETs. ? 1963-2012 IEEE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85115186813&doi=10.1109%2fTED.2021.3110838&partnerID=40&md5=af5c0c133a0f8e13ef2ce5e57b935e46 https://scholars.lib.ntu.edu.tw/handle/123456789/606963 |
ISSN: | 00189383 | DOI: | 10.1109/TED.2021.3110838 |
顯示於: | 電機工程學系 |
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