https://scholars.lib.ntu.edu.tw/handle/123456789/611650
標題: | Behavior modeling and control of 300 mm fab intrabays using distributed agent oriented Petri net | 作者: | Kuo C.-H. Wang C.-H. Huang K.-W. CHUNG-HSIEN KUO |
關鍵字: | Automation;Computer simulation;Database systems;Distributed computer systems;End effectors;Multi agent systems;Petri nets;Process control;User interfaces;Dispatching;Distributed agent oriented Petri net;Distributed multiagent system;Fab intrabays;Integrated circuit foundry fab;Overhead hoist transports;Integrated circuit layout | 公開日期: | 2003 | 卷: | 33 | 期: | 5 | 起(迄)頁: | 641-648 | 來源出版物: | IEEE Transactions on Systems, Man, and Cybernetics Part A:Systems and Humans. | 摘要: | In a 300 mm integrated circuit (IC) foundry fab, the intrabay automation is more important than a 200 mm one. In general, the intrabay automation systems include the automated controls of the process tools, overhead hoist transports (OHTs), stockers, and rail shortcuts. These control systems are operated concurrently. They must be cooperated seamlessly to increase the system performance and to avoid deadlocks. In this paper, the behaviors of the intrabay automation systems are modeled using the distributed agent oriented Petri net (DAOPN). The fab intrabay DAOPN models are categorized into the new-order generation, OHT vehicle dispatching, zone control, path decision, and tool processing agent models. Finally, the DAOPN is defined, and the modeling procedures of the intrabay behaviors are all illustrated. Consequently, an experimental intrabay OHT loop is discussed and evaluated using the proposed DAOPN models and the DAOPN simulator. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0344961675&doi=10.1109%2fTSMCA.2003.817395&partnerID=40&md5=162b9de33602b825372756202e2ee5d2 https://scholars.lib.ntu.edu.tw/handle/123456789/611650 |
DOI: | 10.1109/TSMCA.2003.817395 |
顯示於: | 機械工程學系 |
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