https://scholars.lib.ntu.edu.tw/handle/123456789/611908
標題: | Development of a simple two-dimensional optical measurement system for linear guideways | 作者: | Hsieh T.-H. Huang H.-L. Jywe W.-Y. Chen S.-L. Wen-Yuh Jywe |
關鍵字: | Errors;Interferometers;Laser interferometry;Measurement errors;Optical data processing;Optical design;Optical variables measurement;Horizontal running straightness;Linear guideway;Motion errors;Two-dimensional measurement;Vertical running straightness;Guideways | 公開日期: | 2015 | 卷: | 229 | 期: | 1 | 起(迄)頁: | 141-147 | 來源出版物: | Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture | 摘要: | In this study, a simple two-dimensional measurement system based on optical design was developed to measure the motion errors of the linear guideway. Compared with the transitional methods about the linear guideway for measuring the motion errors, our proposed two-dimensional optical measurement system can simultaneously measure horizontal and vertical running straightness errors for the linear guideway. Calibration results showed that the residual error of the two-dimensional optical measurement system is less than 0.5μm. Measurement results showed that the three tests for the motion errors of the linear guideway are almost coincident with the laser interferometer within 1000 mm. The standard deviations of the horizontal and vertical straightness measurement systems are 0.9 and 1.2μm. ? IMechE 2014. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84937845167&doi=10.1177%2f0954405414525384&partnerID=40&md5=395429376f7423b3a0495b294d8c3a41 https://scholars.lib.ntu.edu.tw/handle/123456789/611908 |
DOI: | 10.1177/0954405414525384 |
顯示於: | 機械工程學系 |
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