https://scholars.lib.ntu.edu.tw/handle/123456789/611938
標題: | Design and control of a long-traveling nano-positioning stage | 作者: | Liu C.-H. Jywe W.-Y. Jeng Y.-R. Hsu T.-H. Li Y.-t. Wen-Yuh Jywe |
關鍵字: | Ball-screw;Closed loop controllers;Contouring accuracy;Design and control;Dual axis;High precision stage;Laser interferometer;Long-travel;Measuring systems;Nano-positioning;Optical measuring systems;PID controllers;Plane mirrors;Rotation accuracy;Rotation mechanism;Interferometers;Laser interferometry;Measurement theory;Mirrors;Piezoelectric actuators;Proportional control systems;Rotation;Spheres | 公開日期: | 2010 | 卷: | 34 | 期: | 3 | 起(迄)頁: | 497-506 | 來源出版物: | Precision Engineering | 摘要: | In this paper, a Dual-Axis Long-Traveling Nano-Positioning Stage (DALTNPS) is presented. In order to extend the traveling and increase the accuracy, the two sorts of stages, a traditional ball-screw stage and a three-degrees-of-freedom (3-DOF) piezo-stage, were composed. The traditional ball-screw stage which is composed of two guide-ways and a ball-screw at each axis is a long-travel stage, and the 3-DOF piezo-stage, which is composed of three piezoelectric actuators and four translation-rotation mechanisms, is a high precision stage. In addition, a 3-DOF measuring system and a PID controller are composed of a 3-DOF closed-loop controller and applied to implement the DALTNPS. The measuring system which is composed of two laser interferometers and two plane mirrors is a 3-DOF optical measuring system. Thus, the position at the x and y axes and the rotation around the z axis can be obtained and they are the responses of DALTNPS. Finally, the experiment results evidence that the DALTNPS is characterized by long-travel, high linear accuracy, high rotation accuracy, high contouring accuracy and high motion speed. ? 2010 Elsevier Inc. All rights reserved. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-77951297948&doi=10.1016%2fj.precisioneng.2010.01.003&partnerID=40&md5=d2880117bc4bf23b95f322a25c09f90c https://scholars.lib.ntu.edu.tw/handle/123456789/611938 |
DOI: | 10.1016/j.precisioneng.2010.01.003 |
顯示於: | 機械工程學系 |
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