https://scholars.lib.ntu.edu.tw/handle/123456789/611939
標題: | Development of a straightness measuring system and compensation technique using multiple corner cubes for precision stages | 作者: | Liu C.-H. Jywe W.-Y. Jeng Y.-R. Huang H.-L. Hsu T.-H. Wang M.-S. Deng S.-Y. Wen-Yuh Jywe |
關鍵字: | Compensation systems;Compensation techniques;Corner cubes;D-space;Dynamic compensation;Low costs;Measurement system;Measuring systems;Online measuring;Precision stage;Static and dynamic;Static compensation;Straightness errors;Measurements;Online systems;Measurement errors | 公開日期: | 2010 | 卷: | 224 | 期: | 3 | 起(迄)頁: | 483-492 | 來源出版物: | Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture | 摘要: | At present, the accuracy of precision manufacture is most affected by straightness errors, so the measurement and compensation of these errors are very important. In the current paper, three measurement systems for straightness are presented; they are characterized by simple set-up, online measuring, low cost, and sub-micrometre accuracy achieving 0.2μm. Experimental results show that these three measurement systems can be applied to implement a compensation system which comprises one among them, an Elmo controller, and a dSPACE controller, and accomplish static compensation and dynamic compensation in the dual linear-axis stage. The accuracies of the static and dynamic compensation achieve ±1μm and ±2.5μm, respectively. ? Authors 2010. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-77950366384&doi=10.1243%2f09544054JEM1620&partnerID=40&md5=4d219dcf60b9229ddc37475243ed04f7 https://scholars.lib.ntu.edu.tw/handle/123456789/611939 |
DOI: | 10.1243/09544054JEM1620 |
顯示於: | 機械工程學系 |
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