https://scholars.lib.ntu.edu.tw/handle/123456789/611940
標題: | Development of a middle-range six-degrees-of-freedom system | 作者: | Jywe W. Jeng Y.-R. Liu C.-H. Teng Y.-F. Wu C.-H. Hsieh T.-H. Duan L.-L. Wen-Yuh Jywe |
關鍵字: | Errors;Flexible structures;Hinges;Measurements;Flexure hinge;Four-degrees-of-freedom;Linear displacements;Measurement system;Measuring systems;Nanometres;Piezoelectric;Positioning control;Degrees of freedom (mechanics) | 公開日期: | 2010 | 卷: | 224 | 期: | 4 | 起(迄)頁: | 679-688 | 來源出版物: | Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture | 摘要: | This paper describes the successful development of a middle-range six-degrees-of-freedom stage, using the features of a flexible structure. The system includes two parts: a middlerange positioning X-Y stage and a four-degrees-of-freedom stage. The flexible structure of the four-degrees-of-freedom stage is built from two kinds of flexible bodies: circular hinges and a new two-degrees-of-freedom flexible body. The four-degrees-of-freedom stage was designed to compensate movement errors including linear displacement, pitch, and roll errors. The linear displacement reaches 20mm along the X-axis, 20mm along the Y-axis, and 5 μm along the Z-axis. The rotation angle around the X-axis (θx), Y-axis (θy), and Z-axis (θz) were all 10 arcsec. A novel six-degrees-of-freedom measuring system was also designed. Precision feedback control is demonstrated in a series of experiments performed using the proposed measurement system. ? Authors 2010. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84861596591&doi=10.1243%2f09544054JEM1436&partnerID=40&md5=8632082aa18f79ff9ce148c5c52a3510 https://scholars.lib.ntu.edu.tw/handle/123456789/611940 |
DOI: | 10.1243/09544054JEM1436 |
顯示於: | 機械工程學系 |
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