https://scholars.lib.ntu.edu.tw/handle/123456789/611949
標題: | Development of a novel laser dual-axis five- degrees-of-freedom measuring system | 作者: | Jywe W. Jeng Y.-R. Liu C.-H. Teng Y.-F. Wen-Yuh Jywe |
關鍵字: | Angular errors;Coupled lasers;Degrees of freedom;Dual axis;Error verification;Laser interferometer;Lead zirconate titanate actuator;Measuring procedure;Measuring systems;Motion errors;Multiple-degrees-of-freedom measurement;Nano-stage;Optical path;Position errors;Quadrant detectors;Quadrant photodetector;Set-ups;Simultaneous measurement;Actuators;Laser Doppler velocimeters;Laser interferometry;Lasers;Measurement errors;Measurement theory;Optoelectronic devices;Photodetectors;Semiconducting lead compounds;Interferometers | 公開日期: | 2009 | 卷: | 223 | 期: | 4 | 起(迄)頁: | 443-448 | 來源出版物: | Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture | 摘要: | In this paper, it presents a useful dual-axial five-degrees-of-freedom measuring system with five degrees of freedom (DoFs) for the simultaneous measurement of five-DoF motion errors of a nano-stage. The system integrates a miniature fibre-coupled laser interferometer with specially designed optical paths and quadrant detectors, capable of measuring five-DoF motion errors. It presents a new precision five-DoF measuring system which has been developed and implemented for the simultaneous measurement of five-DoF motion errors (two linear positions, as well as pitch, roll, and yaw) of a nano-stage. In this paper, the five-DoF laser interferometer was produced by designing the optical path from the one-DoF laser interferometer. The system employs two three-DoF interferometers to detect two position errors and three angular errors of the nano-stage. The experimental set-ups and measuring procedure and a systematic calculated method for the error verification are presented as well. The resolution of measuring the angular errors component is about 0.06′′. ? 2009 IMechE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-67651174348&doi=10.1243%2f09544054JEM1269&partnerID=40&md5=27f1441ebc155565e80febbe1a4d88b6 https://scholars.lib.ntu.edu.tw/handle/123456789/611949 |
DOI: | 10.1243/09544054JEM1269 |
顯示於: | 機械工程學系 |
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