https://scholars.lib.ntu.edu.tw/handle/123456789/611952
標題: | High-resolution three-degrees-of-freedom motion errors measuring system for a single-axis linear moving platform | 作者: | Huang H.-L. Liu C.-H. Jywe W.-Y. Wang M.-S. Wen-Yuh Jywe |
關鍵字: | Angular errors;High resolution;Linear displacements;Measurement system;Measuring systems;Motion errors;Moving platform;Optical theorem;Quadrant detector;Single-axis;Three degrees of freedom;Verification results;Cavity resonators;Measurement theory;Mechanics;Polarization;Measurement errors | 公開日期: | 2009 | 卷: | 223 | 期: | 1 | 起(迄)頁: | 107-114 | 來源出版物: | Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture | 摘要: | In this study, a high-resolution three-degrees-of-freedom (3-DOF) motion error measuring system based on interference is described. It can simultaneously measure the linear displacement and two angular errors of a single-axis linear moving platform. The displacement is measured using a polarization interference technique and the two angular errors are also measured based on the geometry optical theorem. The verification results show that the resolution is about 20nm. The 3-DOF measurement system detected displacements relative to a measurement mirror move with an accuracy of about ±8μm for a measuring range of ± 50mm, and detected the angular errors with a related accuracy of about ± 2 arc sec for a measuring range of ± 100 arc sec. ? IMechE 2009. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-67549145021&doi=10.1243%2f09544054JEM1190&partnerID=40&md5=fffa3806ad20c2a735d08427ae89f6e5 https://scholars.lib.ntu.edu.tw/handle/123456789/611952 |
DOI: | 10.1243/09544054JEM1190 |
顯示於: | 機械工程學系 |
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