https://scholars.lib.ntu.edu.tw/handle/123456789/611958
標題: | Development of a flexure hinge-based stack-type 5 DOF coplanar nanometer-scale stage | 作者: | Jywe W.-Y. Jeng Y.-R. Liu C.-H. Teng Y.-F. Wang H.-S. Fung R.-F. Wen-Yuh Jywe |
關鍵字: | Capacitive sensor;Displacement characteristic;Flexible bodies;Flexure hinge;Manufacturing process;Nano-meter-scale;Piezoelectric;Positioning control;Flexible structures;Piezoelectric actuators;Hinges | 公開日期: | 2007 | 起(迄)頁: | 307-311 | 來源出版物: | AES-ATEMA International Conference Series - Advances and Trends in Engineering Materials and their Applications | 摘要: | This paper concentrates on the design and manufacturing process of a flexure hinge-based stack-type 5 DOF coplanar nanometer-scale stage with high accuracy and multiple DOF. This paper uses the features of a flexible structure to develop a coplanar nanometer-scale stage with 5 DOF that allows the increase or decrease of axis action in accordance with various needs. The flexible structure of the coplanar nanometer-scale stage was included two kinds of the cylindrical flexible body and arc flexible body. The coplanar nanometer-scale stage allows for 3-translational and 2-rotational motions and is provided with eight piezoelectric actuators - one on the X-axis, another on the Y-axis, and the others on the Z-axis. The displacement characteristics of the output member of the stage were measured with the built-in capacitive sensors. ? AES-Advanced Engineering Solutions. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84863081373&partnerID=40&md5=09db2468b62dcf7452f7363edaa44c90 https://scholars.lib.ntu.edu.tw/handle/123456789/611958 |
顯示於: | 機械工程學系 |
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