https://scholars.lib.ntu.edu.tw/handle/123456789/611961
標題: | Development of a Three-Degrees-of-Freedom Laser Linear Encoder for error measurement of a high precision stage | 作者: | Liu C.-H. Jywe W.-Y. Wang M.-S. Huang H.-L. Wen-Yuh Jywe |
關鍵字: | Electronics industry;Errors;Industrial electronics;Stages;Angular errors;Annual conference;Diffraction grating quadrant detecto;Error measurements;External-;Grating scale;High precision stage;Laser encoder;Laser linear encoders;Linear displacements;Linear encoders;Optical theorem;Three degrees of freedom;Lasers | 公開日期: | 2007 | 起(迄)頁: | 2985-2990 | 來源出版物: | IECON Proceedings (Industrial Electronics Conference) | 摘要: | The laser linear encoders are widely used as positioning sensor for a precision linear moving stage. In this paper, a Three-Degrees-Of-Freedom Laser Linear Encoder based on diffraction and interference was developed. It can simultaneously measure the linear displacement and two angular errors of a linear moving stage. The displacement is measured using a polarization interference technique and the two angular errors is also measured based on the near-axis optical theorem. This paper has describes a laser linear encoder that can detect displacements relative to an external grating scale with accuracy about 150 nm for a measuring range ±1000 μm and can detect angular errors with accuracy about 1 arsec for a measuring range ±100 arsecs. ?2007 IEEE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-49949115207&doi=10.1109%2fIECON.2007.4460368&partnerID=40&md5=b3569270a2a346578bde18b5e1bc7044 https://scholars.lib.ntu.edu.tw/handle/123456789/611961 |
DOI: | 10.1109/IECON.2007.4460368 |
顯示於: | 機械工程學系 |
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