https://scholars.lib.ntu.edu.tw/handle/123456789/611989
標題: | Development of a simple system for the simultaneous measurement of pitch, yaw and roll angular errors of a linear stage | 作者: | Liu C.-H. Jywe W.-Y. Chen C.-K. Wen-Yuh Jywe |
關鍵字: | Algorithms;Detectors;Diffraction gratings;Error analysis;Geometry;Inverse kinematics;Optical systems;Error verification;Geometric errors;Quadrant detectors;Metric system | 公開日期: | 2005 | 卷: | 26 | 期: | 7-8 | 起(迄)頁: | 808-813 | 來源出版物: | International Journal of Advanced Manufacturing Technology | 摘要: | A simple measurement system has been developed and implemented for the simultaneous measurement of pitch, yaw and roll of the moving axes of a linear stage. This developed system is based on the principle of the diffractive theorem and optical triangulation. It is composed of a laser source, two quadrant detectors and a diffracting grating. The diffraction grating mounted on the moving axes of a stage reflects an incident laser beam into several diffractive rays and two quadrant detectors are set up for detecting the position of ±1st-order diffraction rays. When the diffraction grating moves, the locations where the diffractive beams are generated change and also the positions of the spots on two quadrant detectors. According to the relationship between the three angular motions of a moving stage and the output coordinates of two quadrant detectors, an inverse algorithm is used to solve these pitch, yaw and roll angular errors through a kinematic analysis . ? Springer-Verlag London Limited 2005. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-26644436286&doi=10.1007%2fs00170-003-2041-z&partnerID=40&md5=e9120da662aaefc1068b53d6f7c58f58 https://scholars.lib.ntu.edu.tw/handle/123456789/611989 |
DOI: | 10.1007/s00170-003-2041-z |
顯示於: | 機械工程學系 |
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