https://scholars.lib.ntu.edu.tw/handle/123456789/612006
標題: | A study of the use of the planar encoder system for the geometric error tests of CNC machine tools | 作者: | Jywe W.-Y. Shyu L.-H. Lee K.-C. Wen-Yuh Jywe |
關鍵字: | Calibration;Contour measurement;Electrooptical devices;Interferometers;Measurement errors;Sensors;Geometric error tests;Planar encoder system;Machine tools | 公開日期: | 2002 | 卷: | 3 | 起(迄)頁: | 3/433-3/439 | 來源出版物: | Proceedings of the Second International Symposium on Instrumentation Science and Technology | 摘要: | In this paper, a new product for a semi-conductor manufacturing device, a planar encoder system, is introduced for geometric error test of a CNC machine tool. The principle of the application is described. For the geometric error test, 12 specified test paths are provided to calibrate the 21 error components. Selection of test path is possible for identified error component. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0141655265&partnerID=40&md5=cb782a722e6ddebefcd4a3abf0e10a9a https://scholars.lib.ntu.edu.tw/handle/123456789/612006 |
顯示於: | 機械工程學系 |
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