https://scholars.lib.ntu.edu.tw/handle/123456789/616412
標題: | Thermal diffusivity in diamond, SiC xN y and BC xN y | 作者: | Chattopadhyay S. Chien S.C. Chen L.C. Chen K.H. Lee H.Y. LI-CHYONG CHEN |
關鍵字: | Microstructure;Photoelectron spectroscopy;Physical vapour deposition;Thermal conductivity | 公開日期: | 2002 | 卷: | 11 | 期: | 3-6 | 起(迄)頁: | 708-713 | 來源出版物: | Diamond and Related Materials | 摘要: | Thermal diffusivity (α) of free standing diamond, amorphous silicon carbon nitride (a-SiC xN y) and boron carbon nitride (a-BC xN y) thin films on crystalline silicon, has been studied using the travelling wave technique. Thermal diffusivity in all of them was found to depend on the microstructure. For a-SiC xN y and a-BC xN y thin films two distinct regimes of high and low carbon contents were observed in which the microstructure changed considerably and that has a profound effect on the thermal diffusivity. The defective C(sp)-N phase plays a key role in determining the film properties. © 2002 Elsevier Science B.V. All rights reserved. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0036508105&doi=10.1016%2fS0925-9635%2801%2900606-9&partnerID=40&md5=77fc2c12f7f674986feeee954c689613 https://scholars.lib.ntu.edu.tw/handle/123456789/616412 |
ISSN: | 09259635 | DOI: | 10.1016/S0925-9635(01)00606-9 | SDG/關鍵字: | Thermal diffusivity;Microstructure;Silicon;Thin films;Diamonds;cutting tool;diamond coating;microstructure;thermal conductivity;vapor deposition |
顯示於: | 凝態科學研究中心 |
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