https://scholars.lib.ntu.edu.tw/handle/123456789/616463
標題: | On the optimized nucleation of near-single-crystal CVD diamond film | 作者: | Chen L.C. Juan C.C. Wu J.Y. Chen K.H. Teng J.W. LI-CHYONG CHEN |
公開日期: | 1996 | 卷: | 416 | 起(迄)頁: | 81-87 | 來源出版物: | Materials Research Society Symposium - Proceedings | 摘要: | Near-single-crystal diamond films have been obtained in a number of laboratories recently. The optimization of nucleation density by using a bias-enhanced nucleation (BEN) method is believed to be a critical step. However, the condition of optimized nucleation has never been clearly delineated. In the present report, a novel quantitative technique was established to monitor the nucleation of diamond in-situ. Specifically, the induced current was measured as a function of nucleation time during BEN. The time-dependence of induced current was studied under various methane concentrations as well as substrate temperatures. The optimized nucleation condition can be unambiguously determined from the current-time plot. Besides the in-situ current probe, ex-situ x-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) were also used to investigate the chemical and morphological evolution. Characteristic XPS and AFM features of optimized nucleation is discussed. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0029758642&partnerID=40&md5=ef4831f200043b7b3aa218d1313274d0 https://scholars.lib.ntu.edu.tw/handle/123456789/616463 |
ISSN: | 02729172 | SDG/關鍵字: | Atomic force microscopy;Chemical vapor deposition;Induced currents;Methane;Morphology;Nucleation;Optimization;Single crystals;Substrates;Temperature;X ray photoelectron spectroscopy;Bias enhanced nucleation;Current time plot;Nucleation density;Diamond films |
顯示於: | 凝態科學研究中心 |
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