https://scholars.lib.ntu.edu.tw/handle/123456789/62383
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Lee, Chi-Yuan | en |
dc.contributor.author | Cheng, Ying-Chou | en |
dc.contributor.author | Wu, Tsung-Tsong | en |
dc.contributor.author | Chen, Yung-Yu | en |
dc.contributor.author | Chen, Wen-Jong | en |
dc.contributor.author | Pao, Shih-Yung | en |
dc.contributor.author | Chang, Pei-Zen | en |
dc.contributor.author | Chen, Ping-Hei | en |
dc.creator | Lee, Chi-Yuan; Cheng, Ying-Chou; Wu, Tsung-Tsong; Chen, Yung-Yu; Chen, Wen-Jong; Pao, Shih-Yung; Chang, Pei-Zen; Chen, Ping-Hei | - |
dc.date | 2004 | en |
dc.date.accessioned | 2008-10-28T06:25:42Z | - |
dc.date.accessioned | 2018-06-28T17:05:02Z | - |
dc.date.available | 2008-10-28T06:25:42Z | - |
dc.date.available | 2018-06-28T17:05:02Z | - |
dc.date.issued | 2004 | - |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/85706 | - |
dc.language | en | en |
dc.language.iso | en_US | - |
dc.relation | Japanese Journal of Applied Physics 43 (6A): 3611-3617 | en |
dc.relation.ispartof | Japanese Journal of Applied Physics | - |
dc.title | In-situ Monitoring of Silicon Membrane Thickness during Wet Etching Using a SAW Sensor | - |
dc.type | journal article | en |
item.fulltext | no fulltext | - |
item.grantfulltext | none | - |
dc.relation.pages | 3611-3617 | - |
dc.relation.journalissue | 43 | - |
item.fulltext | no fulltext | - |
item.cerifentitytype | Publications | - |
item.openairetype | journal article | - |
item.languageiso639-1 | en_US | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.grantfulltext | none | - |
crisitem.author.dept | Biomechatronics Engineering | - |
crisitem.author.dept | Applied Mechanics | - |
crisitem.author.dept | Mechanical Engineering | - |
crisitem.author.orcid | 0000-0002-5737-6960 | - |
crisitem.author.orcid | 0000-0002-4054-6791 | - |
crisitem.author.orcid | 0000-0002-8073-9344 | - |
crisitem.author.parentorg | College of Bioresources and Agriculture | - |
crisitem.author.parentorg | College of Engineering | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 機械工程學系 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。