https://scholars.lib.ntu.edu.tw/handle/123456789/62421
Title: | A circular micromirror array fabricated by a maskless post-CMOS process | Authors: | Cheng, Ying-Chou Dai, Ching-Liang Lee, Chi-Yuan Chen, Ping-Hei Chang, Pei-Zen |
Issue Date: | 2005 | Journal Volume: | 11 | Journal Issue: | 6 | Start page/Pages: | 444-451 | Source: | Microsystem Technologies | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/85736 http://ntur.lib.ntu.edu.tw/bitstream/246246/85736/1/07.pdf |
DOI: | 10.1007/s00542-004-0486-0 |
Appears in Collections: | 機械工程學系 |
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