https://scholars.lib.ntu.edu.tw/handle/123456789/625475
標題: | New differential laser interferometer/vibrometer for nanometer structural displacement/vibration measurements | 作者: | CHIH-KUNG LEE Wu T.-W. |
公開日期: | 1993 | 期: | pt 6 | 起(迄)頁: | 3600-3607 | 來源出版物: | Collection of Technical Papers - AIAA/ASME Structures, Structural Dynamics and Materials Conference | 摘要: | A dual beam differential laser interferometer/vibrometer measurement system was developed for studying the steady-state and dynamic behaviors of light-weight high performance mechanical systems. This newly developed optical system employs many optical and mechanical design tactics to achieve design targets such as nanometer displacement accuracy, ease of use, capability of measuring untreated structural surfaces, high measurement bandwidth, large dynamic range, etc. Both the optical/mechanical configurations and the design approaches adopted are discussed in detail. A flying slider and thin-film disk system currently used in the disk drive industry was used as the testbed to verify the capabilities of this newly developed nanometer structural displacement/velocity measurement system. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0027289792&partnerID=40&md5=c02ee031bc22c1a27d0af00a138ae56d https://scholars.lib.ntu.edu.tw/handle/123456789/625475 |
ISSN: | 01615750 | SDG/關鍵字: | Distance measurement; Laser applications; Velocity measurement; Vibration measurement; Balanced mechanical design; Differential laser interferometers/vibrometers; Doppler principle; Flying slider systems; Light weight high performance mechanical systems; Nanometer structural displacement measurement; Phase/frequency decoding algorithms; Thin film disk systems; Interferometers |
顯示於: | 應用力學研究所 |
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