https://scholars.lib.ntu.edu.tw/handle/123456789/632583
標題: | The Advantages of Double Catalytic Layers for Carbon Nanotube Growth at Low Temperatures (<400 °C) in 3D Stacking and Power Applications | 作者: | Lin, Hong Yi Basu, Nilabh Lee, Min Hung Chen, Sheng Chi MING-HAN LIAO |
關鍵字: | carbon nanotubes | low temperature | package | thermal conductivity | 公開日期: | 1-五月-2023 | 卷: | 13 | 期: | 5 | 來源出版物: | Coatings | 摘要: | A double catalytic layer scheme is proposed and investigated for the low temperature growth of carbon nanotubes (CNTs) over Co (Cobalt), Al (Aluminum), and Ti (Titanium) catalysts on a silicon substrate. In this work, we demonstrate the growth of CNTs by a thermal chemical vapor deposition (TCVD) process at both 350 °C and 400 °C. Based on scanning electron microscopy (SEM) and Raman spectroscopy analyses, the good quality of the CNTs is demonstrated. This study contributes to the on-going research on integrating semiconductors into packaging and power-related applications, as demonstrated with the low resistance (~128 Ω) and high thermal conductivity (~29.8 Wm−1 K−1) of our developed CNTs. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/632583 | ISSN: | 2079-6412 | DOI: | 10.3390/coatings13050965 |
顯示於: | 機械工程學系 |
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