https://scholars.lib.ntu.edu.tw/handle/123456789/641425
標題: | CMOS-MEMS Tuned-Mass-Damper Based Physical Unclonable Function (PUF) | 作者: | Chung, I. Fei Chen, Ting Yi Liou, Ting Jui WEI-CHANG LI |
關鍵字: | mode localization | mode-localized resonators | Physical unclonable function | PUF | security | weakly coupled resonators | 公開日期: | 1-一月-2024 | 來源出版物: | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 摘要: | This work demonstrates for the first time physical unclonable function (PUF) based on CMOS-MEMS resonant tuned-mass-damper (TMD) mode-localized resonators. Particularly, expanding upon the TMD resonator concept introduced in [1], this study utilizes the inherent process variation in the TMD structure that causes the magnitude mismatch between the two coupled vibration modes to realize digital fingerprints using mechanical means. Due to mode localization, the vibration magnitudes of the coupled modes exhibit high sensitivity to the actual TMD dimension. For a total of 28 dies measured, each of which comprises 49 TMD devices/bits, a total of 1372 bits successfully passes rigorous National Institute of Standards and Technology (NIST) randomness tests. Furthermore, these PUFs exhibit the favorable inter-Hamming Distances (inter-HDs) histogram centered at μ = 0.4623 with a standard deviation σ = 0.0739, and entropy characteristics close to 1, representing robust randomness and uniqueness. This MEMS-based technique presents a fresh paradigm for PUF generation with applications in specialized domains. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/641425 | ISBN: | 9798350357929 | ISSN: | 10846999 | DOI: | 10.1109/MEMS58180.2024.10439416 |
顯示於: | 應用力學研究所 |
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