https://scholars.lib.ntu.edu.tw/handle/123456789/65794
標題: | 三次元側向阻尼效應之研究與硬體描述語言模型之建立 | 作者: | 楊燿州 | 關鍵字: | lateral viscous damping;model order reduction;macromodel;comb drive | 公開日期: | 2003 | 出版社: | 臺北市:國立臺灣大學機械工程學系暨研究所 | 摘要: | In this work, a fast algorithm of generating accurate time-domain macromodels of viscous lateral damping for three-dimensional MEMS geometries is described. A three-dimensional finite-difference (FDM) Stokes flow solver for simulating lateral damping effects was developed. The system matrices generated by the solver was then reduced to low-order macromodels that can be easily inserted into a system-level modeling simulators, such as Saber, Simulink or SPICE for transient and frequency analysis. The macromodels have proved to be about threeorder- of-magnitude as efficient as the FDM solver, while preserve the 3-D edge effects that usually require expensive 3-D BEM or FEM calculations. Experimental results of quality factors for comb-drive devices demonstrated that the error of the results estimated by the macromodels is within 15%. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/15858 | 其他識別: | 912218E002021 | Rights: | 國立臺灣大學機械工程學系暨研究所 |
顯示於: | 機械工程學系 |
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912218E002021.pdf | 200.31 kB | Adobe PDF | 檢視/開啟 |
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