https://scholars.lib.ntu.edu.tw/handle/123456789/69738| Title: | Single Diamond Dressing Characteristics of CMP Polyurethane Pad | Authors: | Liao, Y. S. Tsai, M. Y. Sung, J. C. Pai, Y. L. |
Issue Date: | 2006 | Journal Issue: | nil-nil | Start page/Pages: | - | Source: | Key Engineering Materials,In press | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/200187 |
| Appears in Collections: | 機械工程學系 |
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