https://scholars.lib.ntu.edu.tw/handle/123456789/70116| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chen, Yejin | en |
| dc.contributor.author | Fan, K. C. | en |
| dc.contributor.author | Liu, Yusheng | en |
| dc.contributor.author | Cheng, Fang | en |
| dc.creator | Cheng, Fang;Liu, Yusheng;Fan, K. C.;Chen, Yejin | - |
| dc.date | 2007 | en |
| dc.date.accessioned | 2011-02-11T02:22:36Z | - |
| dc.date.accessioned | 2018-06-28T18:21:12Z | - |
| dc.date.available | 2011-02-11T02:22:36Z | - |
| dc.date.available | 2018-06-28T18:21:12Z | - |
| dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/222131 | - |
| dc.language.iso | en_US | - |
| dc.relation.ispartof | Key Engineering Material | - |
| dc.title | A high precision focus probe for the quality assessment of grating pitch | en |
| dc.type | journal article | en |
| item.fulltext | no fulltext | - |
| item.grantfulltext | none | - |
| dc.relation.pages | 200-205 | - |
| dc.relation.journalissue | 339 | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
| item.languageiso639-1 | en_US | - |
| item.openairetype | journal article | - |
| item.cerifentitytype | Publications | - |
| item.grantfulltext | none | - |
| item.fulltext | no fulltext | - |
| Appears in Collections: | 機械工程學系 | |
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