https://scholars.lib.ntu.edu.tw/handle/123456789/70607
Title: | An Experimental Investigation on Silicon Wafer Thinning Process | Authors: | Lin, C.C. Young, H.T. Zhan, J.P. |
Issue Date: | 2008 | Journal Volume: | 29 | Journal Issue: | 5 | Start page/Pages: | 405-412 | Source: | Journal of the Chinese Society of Mechanical Engineers | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/222958 |
Appears in Collections: | 機械工程學系 |
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